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Dry Etching Gas Difluoromethane (R32) | High Purity for Semiconductor Manufacturing

Difluoromethane Also known as HFC-32/R32, molecular formula: CH2F2, as an anisotropic etching gas for Si3N4, it has a relatively low selectivity for SiO2 and Si. In addition to being the main etchant, it can also be used as an auxiliary gas for other main etchants to adjust the fluorine/carbon ratio.

Description

Xiamen Juda Chemical & Equipment Co., Ltd. is one of the leading manufacturers and suppliers of Dry Etching Gas Difluoromethane (R32) | High Purity for Semiconductor Manufacturing in China. If you are looking for Dry Etching Gas Difluoromethane (R32) | High Purity for Semiconductor Manufacturing, please be free to buy our quality products at competitive price from our factory. Contact us for quotation.

 

Dry Etching Gas Difluoromethane (R32) - Product Overview

Dry etching, also known as plasma etching, uses high-energy plasma to remove material from the surface of a wafer. Plasma consists of chemically reactive ions and free radicals that bombard the wafer, breaking the material's molecular bonds and causing them to be etched away. Dry etching techniques include reactive ion etching (RIE), plasma etching, and ion etching. Dry etching allows for better control of the etching process, provides higher resolution, and is able to etch more complex structures

 

Dry Etching Gas Difluoromethane (R32), also known by its chemical formula CH2F2, is a high-purity gas widely used in semiconductor etching and plasma etching processes. This advanced etching gas is essential for creating intricate patterns in semiconductor fabrication, including the etching of materials like silicon nitride (Si3N4), silicon dioxide (SiO2), and other materials commonly used in semiconductor device manufacturing.

difluoromethane
 
Key Features and Benefits, Technical Specifications

 

As a leading supplier of difluoromethane (R32), we offer bulk supply and competitive pricing, tailored to meet the specific needs of semiconductor fabs and other industrial applications.

 

Key Features and Benefits:

 High Purity: Our difluoromethane (R32) meets the stringent purity requirements of the semiconductor industry, typically in the range of 99.9% to 99.99%.

 Wide Application Range: Ideal for use in dry etching and plasma etching processes in semiconductor manufacturing.

 Fast Response and Delivery: With a commitment to excellence in supply chain management, we ensure fast lead times and reliable delivery.

 Customized Packaging: Available in disposable cylinders, ISO tanks, and bulk packaging to suit your specific supply requirements.

 Compliance with Industry Standards: Meets global safety and regulatory standards such as UN No. 3252 (flammable gas) and Class 2.1.

 

Technical Specifications

Model NO. R32 Appearance Colorless

Fat Hydrocarbon Saturation

Alkane Molecular formula CH2F2
Molecular Weight 52.02 Critical Pressure(MPa) 5.80
Boiling point (°C ) -51.70 Density(30°C ) 0.958
ODP 0 Application Refrigerant for Air Condition, Refrigerant R32
GWP 675 Packing Disposable Cylinder /Refillable Cylinder/ISO Tank
Class No. 2.1 Purity 99.9%~99.99%
Un No. 3252 Origin China

 

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Applications in Semiconductor Manufacturing

 

Difluoromethane (R32) is widely used in the semiconductor industry, particularly in dry etching and plasma etching applications, where precision and high purity are critical. It is an essential part of the fabrication process for integrated circuits (ICs), microelectronics, and MEMS (micro-electromechanical systems) devices.

 

Typical Applications:

Etching of Si3N4 (Silicon Nitride) layers in semiconductor devices

Plasma etching of SiO2 (Silicon Dioxide) for pattern definition in microelectronics

Use in dry etching for the creation of thin films and precise microstructures

 

 
Why Choose Our Etching Gas Difluoromethane?

 

 

why choose us
 
 
 

Industry Expertise

With years of experience, we are a trusted supplier for the global semiconductor industry.

 
 

High-Quality Assurance

We provide the highest purity difluoromethane (R32), ensuring consistency and reliability in your etching processes.

 
 

Customized Supply Solutions

From bulk orders to small shipments, we can provide flexible supply chain solutions tailored to your needs.

 
 

Competitive Pricing

We offer cost-effective pricing for bulk purchases, making us the preferred choice for large-scale semiconductor manufacturers.

 

 

 
Packaging and Delivery Options

 

We understand that B2B semiconductor procurement often requires flexibility in both packaging and delivery. We offer a variety of packaging options to meet the unique needs of our clients:

 

Disposable Cylinders (Standard and Custom Sizes)

ISO Tanks (for larger volumes and industrial applications)

Bulk Supply (for large-scale, ongoing supply agreements)

Lead Time: Delivery typically within 30-40 days, depending on the quantity and destination.

Bulk Orders: Contact us to get the most competitive prices and volume-based discounts.

 

XIAMEN JUDA CHEMICAL EQUIPMENT CO LTD

 
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gas r410a factory 1
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Difluoromethane (R32) Supplier 

 

REFRIGERANT GAS SUPPLIER XIAMEN JUDA CHEMICAL EQUIPMENT COLTD

Get in Touch with Us

If you're looking for a reliable supplier of dry etching gas difluoromethane (R32), look no further. We are committed to providing top-quality products, competitive prices, and superior customer service.

 

For inquiries or to place an order, contact our sales team today!

 
Frequently Asked Questions (FAQ)

Q: What is the purity level of your difluoromethane (R32) gas?

A: Our difluoromethane (R32) typically has a purity level of 99.9% to 99.99%, ensuring it meets the strict requirements for semiconductor manufacturing and other high-tech applications.

Q: Can you provide the gas in large quantities?

A: Yes, we offer both bulk supply and customized packaging options for high-volume orders. Whether you need ISO tanks or disposable cylinders, we can accommodate your needs.

Q: What is the lead time for delivery?

A: Standard delivery time is 30-40 days for bulk orders. However, we can offer faster delivery depending on the order size and location.

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