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Dry Etching Gas Difluoromethane

Difluoromethane Also known as HFC-32/R32, molecular formula: CH2F2, as an anisotropic etching gas for Si3N4, it has a relatively low selectivity for SiO2 and Si. In addition to being the main etchant, it can also be used as an auxiliary gas for other main etchants to adjust the fluorine/carbon ratio.

Description

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Dry etching, also known as plasma etching, uses high-energy plasma to remove material from the surface of a wafer. Plasma consists of chemically reactive ions and free radicals that bombard the wafer, breaking the material's molecular bonds and causing them to be etched away. Dry etching techniques include reactive ion etching (RIE), plasma etching, and ion etching. Dry etching allows for better control of the etching process, provides higher resolution, and is able to etch more complex structures

 

R32, also known as Difluoromethane, is a highly effective etching gas that is widely utilized in the plasma etching processes within the electronics industry. Furthermore, it is an outstanding coolant that doesn't deplete the ozone layer and is widely utilized in refrigeration equipment such as air conditioners, fridges, and car air conditioners. Embracing this eco-friendly coolant not only ensures that we are doing our part for the environment but also guarantees that we can maintain optimal temperatures for our devices while operating with maximum efficiency. R32 truly presents a remarkable solution that meets the diverse needs in the industry today.

difluoromethane
 
Characteristics of etchant gas Difluoromethane R32 

 

Since etching gas affects the performance, integration, yield and other key indicators of integrated circuits, there are high requirements for the purity of electronic gas. Due to major process difficulties, electronic gas has become the second largest material, and its cost share is second only to silicon wafers.

 

R32 gas difluoromethane is an important etching gas in the plasma etching process of the electronics industry. below are characteristicsof R32:

Model NO. R32 Appearance Colorless

Fat Hydrocarbon Saturation

Alkane Molecular formula CH2F2
Molecular Weight 52.02 Critical Pressure(MPa) 5.80
Boiling point (°C ) -51.70 Density(30°C ) 0.958
ODP 0 Application Refrigerant for Air Condition, Refrigerant R32
GWP 675 Packing Disposable Cylinder /Refillable Cylinder/ISO Tank
Class No. 2.1 Purity 99.9%~99.99%
Un No. 3252 Origin China

 

 
Package of R32

 

Cylinder Specifications:                                          valve:                                                    Filling quantity:

product-984-140

 

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FAQ

Q: Could I use my own LOGO or design on goods?

A: Customized logo and design on mass production are available.

Q: How about the payment term?

A: TT, L/C at sight etc. Normally 30% T/T in advance, 30% TT before shipment, the balance against the copy of B/L

Q:What is the delivery time?

A:25 to 35 days for mass production.

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