Xiamen Juda Chemical & Equipment Co., Ltd. is one of the leading manufacturers and suppliers of pfpe inert vacuum pump oil: for contamination-critical systems in China. If you are looking for pfpe inert vacuum pump oil: for contamination-critical systems, please be free to buy our quality products at competitive price from our factory. Contact us for quotation.
PFPE Inert Vacuum Pump Oil: For Contamination-Critical Systems

This specialized PFPE inert vacuum pump oil is engineered for applications demanding the ultimate in system cleanliness and stability. With an ultra-low outgassing rate and exceptional purity, it is the critical fluid for maintaining performance in ultra-high vacuum (UHV) systems, sensitive analytical instruments, and processes where even trace contamination is unacceptable. For B2B buyers in semiconductor research, aerospace testing, and advanced materials science, this oil is not just a lubricant but a vital component for ensuring data integrity and process yield.
The "Inert" Advantage: Stability, Purity & Performance
Unlike standard fluids, this inert PFPE oil is formulated for maximum molecular stability under extreme conditions. Its primary function in a vacuum system is twofold: to lubricate and seal mechanical components while contributing zero contamination to the vacuum chamber. Its exceptionally low vapor pressure minimizes backstreaming, and its high chemical stability ensures it will not react with process gases, oxygen, or system materials, making it also suitable for oxygen service applications.
Technical Specifications: The Benchmark for Critical Fluids
This low outgassing pump oil meets the stringent requirements of advanced applications.
| Property | Specification / Performance Characteristic | Significance for Critical Applications |
|---|---|---|
| Product Name | PFPE Inert Vacuum Pump Oil | The high-purity formulation for demanding environments. |
| Core Performance Attribute | Low Vapor Pressure | Fundamental for achieving and maintaining a deep, stable vacuum with minimal fluid contribution to chamber pressure. |
| Core Performance Attribute | High Chemical Stability | Chemically inert; will not react with most process gases, ensuring long-term fluid integrity and component protection. |
| Core Performance Attribute | Excellent Thermal Stability | Maintains its properties at high operating temperatures, preventing thermal breakdown and sludge formation inside the pump. |
| Key Feature | Good Lubricity | Provides superior protection for pump rotors, vanes, and bearings, reducing mechanical wear and extending pump service life. |
| Specific Application | Designed for use in rotary vane pumps, rotary piston pumps, mechanical booster pumps, and other vacuum equipment. | The trusted choice for protecting precision vacuum assets. |
| Ideal Use Case | Specifically suitable for ultra-high vacuum systems, applications requiring oxygen compatibility, and environments with corrosive gases or solvent vapors. | The definitive fluid for UHV compatible pump fluid and harsh conditions. |
| Performance Benefit | Extends pump service life by preventing corrosion and deposit formation caused by fluid breakdown. | Directly reduces total cost of ownership through fewer rebuilds and less downtime. |
| Operational Result | Delivers stable vacuum performance and reliable operation in the most challenging conditions. | Ensures consistent results in research, development, and production. |
Applications: Where Extreme Purity is Non-Negotiable
Surface Science & Advanced Research: Used in X-ray Photoelectron Spectroscopy (XPS), Scanning Probe Microscopy (SPM), and Molecular Beam
Epitaxy (MBE) systems where hydrocarbon contamination would create false signals or ruin grown films.
Space Simulation & Aerospace Testing: Essential in thermal vacuum chambers and space environment simulators. Its low outgassing properties prevent the deposition of contaminants on sensitive satellite components during testing.
Semiconductor Capital Equipment & R&D: Specified for the backing pumps on high-end Atomic Layer Deposition (ALD) tools, electron microscopes (SEM/TEM), and other metrology equipment where pump backstreaming could affect wafer yield or measurement accuracy.
High-Purity Chemical & Pharmaceutical Processing: Used in systems handling sensitive catalysts or high-value pharmaceutical intermediates, where fluid purity is as critical as the process itself.
Data of our PFPE Inert Vacuum Pump Oil JHLO Series
|
Main properties |
Unit |
JHLO-04 |
JHLO-06 |
JHLO-15 |
JHLO-25 |
|
Kinematic viscosity at 20°C |
cSt |
38 |
60 |
150 |
250 |
|
Pour point |
°C |
<-58 |
<-50 |
<-45 |
<-35 |
|
Evaporation weight loss 120°C/22h |
% |
<10 |
<8 |
- |
- |
|
Evaporation weight loss 149°C/22h
|
% | - | <22 | <3 | <3 |
|
Surface tension at 20°C |
dyne/cm | 20-22 | 20-22 | 20-22 | 21-23 |
|
Density at 20°C |
g/cm3 | 1.87 | 1.88 | 1.89 | 1.90 |
The advantages of our PFPE Inert Vacuum Pump Oil

• Low vapor pressure
• Chemical inertness
• High thermal stability

• Good lubricant properties
• No flash or fire point
• Non-toxicity

• Excellent compatibility with metals, plastics, elastomers
• Good aqueous and non-aqueous solvent resistance

• Low surface tension
• Good radiation stability
• Environmentally acceptable
PFPE Inert Vacuum Pump Oil supplier - Xiamen Juda Chemical

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