Xiamen Juda Chemical & Equipment Co., Ltd. is one of the leading manufacturers and suppliers of semiconductor cleaning solvent hydrofluoroether hfe 347 in China. If you are looking for semiconductor cleaning solvent hydrofluoroether hfe 347, please be free to buy our quality products at competitive price from our factory. Contact us for quotation.
About Semiconductor Cleaning Tel：+86-592-5803997
From 7 nm wafers to advanced packaging, every new node pushes feature sizes toward physical limits and turns "cleaning"-once a background step-into a nanometer- or even angstrom-level mission. Traditional fluorocarbons (CFC-113, PFC) are non-flammable and low in toxicity, but their ozone-depletion or high-GWP profiles have triggered global bans. Aqueous chemistries, meanwhile, often leave water marks, corrode metals and consume large amounts of drying energy. Hydrofluoroether (HFE), combining zero ODP, low GWP, non-flammability and zero residue, has quickly become the fab engineer's new favorite and is now regarded as a powerful complement and upgrade to conventional methods.
What is Hydrofluoroether? Tel：+86-592-5803997
HFE (Hydrofluoroether) is a class of organic compounds composed of hydrogen, fluorine, carbon and oxygen, combining ether bonds (R-O-R') and fluoroalkyl structures. It is designed to retain the excellent performance of fluorinated solvents while reducing environmental impacts (such as ozone layer depletion and global warming potential). HFE is widely used as a precision cleaning agent, coolant, solvent carrier, etc., especially in the electronics, semiconductor and aerospace fields.
Basic Information Of Hydrofluoroether HFE347
Tel：+86-592-5803997
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Chemical Name: |
1,1,2,2-Tetrafluoroethyl 2,2,2-trifluoroethyl ether |
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CAS: |
406-78-0 |
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MF: |
C4H3F7O |
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MW: |
200.05 |
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EINECS: |
609-858-6 |
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Chemical Properties |
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Boiling point |
56.2 °C |
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density |
1.487 |
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refractive index |
1.276 |
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Specific Gravity |
1.487 |
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CAS DataBase Reference |
406-78-0(CAS DataBase Reference) |
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EPA Substance Registry System |
HFE-347pcf2 (406-78-0) |
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Test items |
Specifications |
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Appearance |
Clear colorless liquid |
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Purity |
≥99.5% |
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Water |
≤100ppm |
Advantages Vs. Traditional Solvents
| Comparison item | HFE | CFC-113 (phased out) | HCFC-141b |
| ODP (Ozone Depletion Potential) | 0 | 0.8 | 0.11 |
| GWP | ~350 | 6000 | 725 |
| Cleaning efficiency | High | High | Medium |
| Flammability | Non-flammable | Non-flammable | Flammable |
Key Benefits Of HFE 347 In Wafer Cleaning Tel：+86-592-5803997
Integrating HFE 347 into your wafer cleaning process delivers the following core advantages:
Superior Drying Performance for "Zero-Defect" Results
With extremely low surface tension and high volatility, HFE 347 evaporates completely without residue, fundamentally eliminating pattern collapse and watermarks-an outcome unattainable with post-RCA cleaning aqueous drying.
Excellent Material Compatibility
Gentle on wafers, metals, ceramics, and most polymers, it prevents corrosion or damage, ensuring the cleaning process does not introduce new defects.
Targeted Cleaning Power
Exceptional solubility for PFPE (perfluoropolyether) vacuum pump oils, greases, certain photoresist residues, and organic particles makes it the solvent of choice for removing these specific contaminants.
High Process Flexibility
Compatible with immersion, spray, vapor degreasing, and other wafer cleaning methods. Particularly suited for cleaning precision parts and chamber components offline, preventing contaminant transfer to wafers.
Environmental & Safety Compliance
Features zero ODP (Ozone Depletion Potential) and low GWP (Global Warming Potential), aligning with stringent environmental regulations. Its low toxicity and non-flammability enhance operational safety.
Azeotrope Formation Capability
Can form azeotropic mixtures with alcohols (e.g., IPA), enabling a "single-step" clean-and-dry process: dissolve organic contaminants first, then displace with pure HFE 347 for perfect drying, significantly streamlining the workflow.
Reduced Water and Wastewater Usage
As a non-aqueous solvent, HFE 347 lessens dependence on ultrapure water and reduces the burden of high-cost wastewater treatment
Hydrofluoroether HFE 347 Factory Tour Tel：+86-592-5803997
Hydrofluoroether HFE347 supplier - Company Profile Tel：+86-592-5803997
Xiamen Juda Chemical & Equipment Co., Ltd. is a key strategic investment of Juhua Group (a benchmark enterprise in China's fluorochemical industry) in the field of high-end electronic materials.
Leveraging the Group's advantages across the entire industrial chain, from basic fluorine raw materials to cutting-edge fluoropolymers, and decades of technological accumulation, Juda is committed to breaking foreign monopolies and achieving independent control over key electronic materials. It focuses on providing indispensable advanced fluorine material solutions for semiconductor, integrated circuit, and high-end electronics manufacturing.
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