Sulfur Hexafluoride SF6 Gas Semiconductor

Sulfur Hexafluoride SF6 Gas is a synthetic, odourless gas that's used in the electricity industry to keep networks running safely and reliably. It's highly stable, non-toxic, non-flammable and electronegative, which means it will not form other compounds that will alter its state and effectiveness.

 

SF6 gas is one of the most commonly used fluoride gases in semiconductor dry etching. It is characterized by high selectivity and strong etching rate. It is suitable for etching of low dielectric constant materials such as silicon oxide, silicon fluoride, silicon nitride, etc.

 

SF6 CAS NO.:2551-62-4

The sulfur hexafluoride chemical formula is SF₆ and its molar mass is 146.00554 g mol^-1. The structure of sulfur hexafluoride is octahedron, with 6 fluorine atoms bound to a central sulfur atom. Each S-F bond has a 90º angle. Its chemical structure can be written as below, in the common representations used for organic molecules.

 Sulfur hexafluoride (SF6) plasmas are commonly used in the deep etching of silicon (Si), silicon oxide (SiO2) and more recently silica glass .

 Sulfur hexafluoride is an inorganic compound. It is a colorless, odorless, non-toxic, non-flammable stable gas at normal temperature and pressure. It is a new generation of ultra-high voltage insulating dielectric material. As a good gas insulator, it is mainly used for arc extinguishing in high-voltage switches, and as an insulating material in large-capacity transformers and high-voltage cables. often replacing oil filed circuitbreakers(OCBs) that can contain harmful PCBs.

 Sulfur hexafluoride was the tracer gas used in the first roadway air dispersion modelcalibration,it has been used successfully as a tracer in oceanography to study diapycnalmixing and air-sea gas exchange.

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